Precise SEM Cross Section Polishing via Argon Beam Milling
نویسندگان
چکیده
منابع مشابه
TEM sample preparation of a SEM cross section using electron beam induced deposition of carbon
Article history: Received 25 May 2015 Received in revised form 3 July 2015 Accepted 6 July 2015 Available online xxxx
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ژورنال
عنوان ژورنال: Microscopy Today
سال: 2006
ISSN: 1551-9295,2150-3583
DOI: 10.1017/s155192950005762x